Autonomous shock sensing using bi-stable triboelectric generators and MEMS electrostatic levitation actuators

Abstract This work presents an automatic threshold shock-sensing trigger system that consists of a bi-stable triboelectric transducer and levitation-based electrostatic mechanism. The mechanism is sensitive to mechanical shocks releases impact energy when the shock strong enough. A generator produces voltage it receives shock. proportional When exceed certain level, initially pulled-in microelectromechanical (MEMS) switch opened can disconnect current in safety electronic system. MEMS combines two mechanisms gap-closing (parallel-plate electrodes) with levitation (side provide bi-directional motions. closed from small bias on electrodes. connected side goes beyond threshold, upward force caused by electrodes becomes enough peel off position. detect tunable using control parameters. These tuning parameters are axial (clamped-clamped beam) (gap-closing electrodes). actuation macro-scale thus directly sensor-switch micro-scale. chain makes autonomous sensing stand-alone has potential application air bag deployment devices powerline protection systems. We theoretical frame entire validated experimental results.